Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

VPO4 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing VPO4 films returned 1 record(s).

NumberTitle
1Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material