Title: Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
Type: Journal
Info: Chem. Mater., 2014, 26 (23), pp 6863-6871
Date: 2014-11-14
DOI: http://dx.doi.org/10.1021/cm503587w
Name
Institution
Ghent University
Characteristic
Analysis
Diagnostic
Thickness
Ellipsometry
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OES
OES, Optical Emission Spectroscopy
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Gas Phase Species
QMS, Quadrupole Mass Spectrometer
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Gas Phase Species
FTIR, Fourier Transform InfraRed spectroscopy
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Silicon
Plasma-Enhanced Atomic Layer Deposition
240
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