Matthias M. Minjauw Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Matthias M. Minjauw returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
2Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
3Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4-precursor and H2-plasma
4Plasma-enhanced atomic layer deposition of zinc phosphate
5Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy