Publication Information

Title: Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition

Type: Journal

Info: Review of Scientific Instruments 87, 113905 (2016)

Date: 2016-10-31

DOI: http://dx.doi.org/10.1063/1.4967711

Author Information

Name

Institution

Ghent University

Ghent University

Ghent University

Ghent University

Synchrotron SOLEIL

Synchrotron SOLEIL

European Synchrotron Radiation Facility (ESRF)

Synchrotron SOLEIL

Ghent University

Films

Thermal Ru using Custom

Deposition Temperature = 100C

20427-56-9

1333-74-0

Plasma Ru using Custom

Deposition Temperature = 100C

20427-56-9

1333-74-0

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Nucleation

XRF, X-Ray Fluorescence

Synchrotron

Nucleation

GISAXS, Grazing Incidence Small Angle X-ray Scattering

Synchrotron

Substrates

Si-H

SiO2

Keywords

Notes

879



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