Search 1561 plasma ALD publications by:
Search 1561 plasma ALD publications by:
Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
Type:
Journal
Info:
Review of Scientific Instruments 87, 113905 (2016)
Date:
2016-10-31
Author Information
Name | Institution |
---|---|
Jolien Dendooven | Ghent University |
Eduardo Solano | Ghent University |
Matthias M. Minjauw | Ghent University |
Kevin Van de Kerckhove | Ghent University |
Alessandro Coati | Synchrotron SOLEIL |
Emiliano Fonda | Synchrotron SOLEIL |
Giuseppe Portale | European Synchrotron Radiation Facility (ESRF) |
Yves Garreau | Synchrotron SOLEIL |
Christophe Detavernier | Ghent University |
Films
Film/Plasma Properties
Characteristic: Nucleation
Analysis: XRF, X-Ray Fluorescence
Characteristic: Nucleation
Analysis: GISAXS, Grazing Incidence Small Angle X-ray Scattering
Substrates
Si-H |
SiO2 |
Keywords
Notes
879 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |