Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
Type:
Journal
Info:
Review of Scientific Instruments 87, 113905 (2016)
Date:
2016-10-31
Author Information
| Name | Institution |
|---|---|
| Jolien Dendooven | Ghent University |
| Eduardo Solano | Ghent University |
| Matthias M. Minjauw | Ghent University |
| Kevin Van de Kerckhove | Ghent University |
| Alessandro Coati | Synchrotron SOLEIL |
| Emiliano Fonda | Synchrotron SOLEIL |
| Giuseppe Portale | European Synchrotron Radiation Facility (ESRF) |
| Yves Garreau | Synchrotron SOLEIL |
| Christophe Detavernier | Ghent University |
Films
Film/Plasma Properties
Characteristic: Nucleation
Analysis: XRF, X-Ray Fluorescence
Characteristic: Nucleation
Analysis: GISAXS, Grazing Incidence Small Angle X-ray Scattering
Substrates
| Si-H |
| SiO2 |
Notes
| 879 |