Publication Information

Title:
Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
Type:
Journal
Info:
Review of Scientific Instruments 87, 113905 (2016)
Date:
2016-10-31

Author Information

Name Institution
Jolien DendoovenGhent University
Eduardo SolanoGhent University
Matthias M. MinjauwGhent University
Kevin Van de KerckhoveGhent University
Alessandro CoatiSynchrotron SOLEIL
Emiliano FondaSynchrotron SOLEIL
Giuseppe PortaleEuropean Synchrotron Radiation Facility (ESRF)
Yves GarreauSynchrotron SOLEIL
Christophe DetavernierGhent University

Films

Thermal Ru


Plasma Ru


Film/Plasma Properties

Characteristic: Nucleation
Analysis: XRF, X-Ray Fluorescence

Characteristic: Nucleation
Analysis: GISAXS, Grazing Incidence Small Angle X-ray Scattering

Substrates

Si-H
SiO2

Keywords

Notes

879