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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
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Eduardo Solano Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Eduardo Solano returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Shuffling Atomic Layer Deposition Gas Sequences to Modulate Bimetallic Thin Films and Nanoparticle Properties
2Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
3Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature
4Tuning size and coverage of Pd nanoparticles using atomic layer deposition
5Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
6Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
7On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies