Your search for publications using this chemistry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition|
|2||Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4-precursor and H2-plasma|
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