Kevin Van de Kerckhove Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kevin Van de Kerckhove returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Plasma-enhanced atomic layer deposition: Correlating O2 plasma parameters and species to blister formation and conformal film growth
2Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition