Search 1561 plasma ALD publications by:
Search 1561 plasma ALD publications by:
Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe2O3-SnO2
Type:
Journal
Info:
Journal of Vacuum Science & Technology A 37, 050904 (2019)
Date:
2019-08-09
Author Information
Name | Institution |
---|---|
Jeroen Kint | Ghent University |
Felix Mattelaer | Ghent University |
Matthias M. Minjauw | Ghent University |
Bo Zhao | Ghent University |
Christophe Detavernier | Ghent University |
Films
Plasma SnO2
Plasma Fe2O3
Plasma FeSnO
Film/Plasma Properties
Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Characteristic: Chemical Composition, Impurities
Analysis: XRF, X-Ray Fluorescence
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Characteristic: Electrochemical Performance
Analysis: Custom
Substrates
SiO2 |
Pt |
Keywords
Batteries |
Notes
1510 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |