Felix Mattelaer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Felix Mattelaer returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe2O3-SnO2
2Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
3Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing
4Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
5Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
6Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films
7Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
8A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films
9Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor