Felix Mattelaer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Felix Mattelaer returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe2O3-SnO2
2A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films
3Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
4Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films
5Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
6Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
7Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
8Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing