Felix Mattelaer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Felix Mattelaer returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
2Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
3Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
4Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
5Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe2O3-SnO2
6Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films
7Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing
8A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films
9Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material