Felix Mattelaer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Felix Mattelaer returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films
2Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films
3Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe2O3-SnO2
4Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
5Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing
6Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
7Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
8Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material