Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene

Type:
Journal
Info:
Chem. Commun., 2015,51, 3556-3558
Date:
2015-01-22

Author Information

Name Institution
Amit K. RoyGhent University
Jolien DendoovenGhent University
Davy DeduytscheGhent University
Kilian Devloo-CasierGhent University
Kim RagaertGhent University
Ludwig CardonGhent University
Christophe DetavernierGhent University

Films

Thermal Al2O3


Plasma Al2O3


Film/Plasma Properties

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy

Characteristic: Wetting Angle
Analysis: Sessile Drop Tests

Substrates

PTFE

Keywords

Hydrophilic

Notes

Custom ICP PEALD and thermal ALD Al2O3 comparison for improving wettability and gluability of PTFE.
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