Davy Deduytsche Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Davy Deduytsche returned 15 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor
2A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
3Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
4Texture of atomic layer deposited ruthenium
5Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
6Ru thin film grown on TaN by plasma enhanced atomic layer deposition
7Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
8Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma
9Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
10Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
11Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
12Atomic layer deposition of titanium nitride from TDMAT precursor
13TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition
14Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
15Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions