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Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
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Davy Deduytsche Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Davy Deduytsche returned 15 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor
2TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition
3Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma
4Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
5Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
6A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
7Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
8Ru thin film grown on TaN by plasma enhanced atomic layer deposition
9Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
10Texture of atomic layer deposited ruthenium
11Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions
12Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
13Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
14Atomic layer deposition of titanium nitride from TDMAT precursor
15Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene