Davy Deduytsche Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Davy Deduytsche returned 15 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
2Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
3TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition
4Texture of atomic layer deposited ruthenium
5Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
6Atomic layer deposition of titanium nitride from TDMAT precursor
7Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
8Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
9Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions
10A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
11Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor
12Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
13Ru thin film grown on TaN by plasma enhanced atomic layer deposition
14Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
15Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma