Davy Deduytsche Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Davy Deduytsche returned 15 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic layer deposition of titanium nitride from TDMAT precursor
2Texture of atomic layer deposited ruthenium
3Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
4Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
5Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
6Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma
7Ru thin film grown on TaN by plasma enhanced atomic layer deposition
8Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
9TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition
10Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
11Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
12Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
13Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor
14A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
15Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions