Davy Deduytsche Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Davy Deduytsche returned 14 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
2Atomic layer deposition of titanium nitride from TDMAT precursor
3Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
4Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
5Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
6Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma
7Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
8Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
9Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
10Ru thin film grown on TaN by plasma enhanced atomic layer deposition
11TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition
12Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor
13Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
14Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions