Kilian Devloo-Casier Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kilian Devloo-Casier returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
2Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
3Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
4Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene