Kilian Devloo-Casier Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kilian Devloo-Casier returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
2Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
3Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
4Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing