Kilian Devloo-Casier Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kilian Devloo-Casier returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
2Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
3Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
4Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing