Publication Information

Title: Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film

Type: Journal

Info: ECS J. Solid State Sci. Technol. 2012 volume 1, issue 4, Q63-Q69

Date: 2012-07-02

DOI: http://dx.doi.org/10.1149/2.001204jss

Author Information

Name

Institution

Hanyang University

Hanyang University

Hanyang University

Hanyang University

Hanyang University

Hanyang University

Hanyang University

Hanyang University

Films

Plasma TiO2 using Custom ICP

Deposition Temperature Range = 150-300C

546-68-9

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Photocatalytic Activity

Custom

Custom

Microstructure

TEM, Transmission Electron Microscope

Unknown

Compositional Depth Profiling

AES, Auger Electron Spectroscopy

Unknown

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

Electron Diffraction

Unknown

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Unknown

Substrates

Si(100)

Keywords

Photocatalyst

Notes

641



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