Search Plasma ALD Publication Database By...

Publication Information

Title: Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film

Type: Journal

Info: ECS J. Solid State Sci. Technol. 2012 volume 1, issue 4, Q63-Q69

Date: 2012-07-02

DOI: http://dx.doi.org/10.1149/2.001204jss

Author Information

Name

Institution

Hanyang University

Hanyang University

Hanyang University

Hanyang University

Hanyang University

Hanyang University

Hanyang University

Hanyang University

Films

Plasma TiO2 using Custom ICP

Deposition Temperature Range = 150-300C

546-68-9

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Photocatalytic Activity

Custom

Custom

Microstructure

TEM, Transmission Electron Microscope

Unknown

Compositional Depth Profiling

AES, Auger Electron Spectroscopy

Unknown

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

Electron Diffraction

Unknown

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Unknown

Substrates

Si(100)

Keywords

Photocatalyst

Notes

641

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

Follow plasma-ald.com on Twitter

Follow @PlasmaALDGuy

Shortcuts



© 2014-2018 plasma-ald.com