Seung Jae Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Seung Jae Lee returned 2 record(s).

Number	Title
1	Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
2	Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film