Inductively coupled plasma sources from Plasma ALD, LLC.


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Seung Jae Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Seung Jae Lee returned 2 record(s).

NumberTitle
1Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
2Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition