Publication Information

Title: Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition

Type: Journal

Info: Applied Catalysis B: Environmental 91 (2009) 628 - 633

Date: 2009-06-30

DOI: http://dx.doi.org/10.1016/j.apcatb.2009.06.037

Author Information

Name

Institution

Pohang University of Science and Technology (POSTECH)

Pohang University of Science and Technology (POSTECH)

Pohang University of Science and Technology (POSTECH)

Pohang University of Science and Technology (POSTECH)

Pohang University of Science and Technology (POSTECH)

Films

Plasma TiO2 using Custom ICP

Deposition Temperature Range = 150-250C

3275-24-9

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

-

Optical Properties

Ellipsometry

-

Adhesion

Custom

-

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

-

Bonding States

XPS, X-ray Photoelectron Spectroscopy

-

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

GIXRD, Grazing Incidence X-Ray Diffraction

-

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

-

Photocatalytic Activity

Contact Angle Measurement

-

Photocatalytic Activity

Organic Compound Decomposition

Custom

Substrates

Polyimide

Keywords

Photocatalyst

Notes

749



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