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Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
Type:
Journal
Info:
Applied Catalysis B: Environmental 91 (2009) 628 - 633
Date:
2009-06-30
Author Information
| Name | Institution |
|---|---|
| Changsoo Lee | Pohang University of Science and Technology (POSTECH) |
| Jungwon Kim | Pohang University of Science and Technology (POSTECH) |
| J. Y. Son | Pohang University of Science and Technology (POSTECH) |
| Wonyong Choi | Pohang University of Science and Technology (POSTECH) |
| Hyungjun Kim | Pohang University of Science and Technology (POSTECH) |
Films
Plasma TiO2
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Optical Properties
Analysis: Ellipsometry
Characteristic: Adhesion
Analysis: Custom
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Photocatalytic Activity
Analysis: Contact Angle Measurement
Characteristic: Photocatalytic Activity
Analysis: Organic Compound Decomposition
Substrates
| Polyimide |
Notes
| 749 |