2022 Year in Review

August 2023 Stats


The publication database currently has 1692 entries.
210 Films
283 Precursors
78 Dep Hardware Sets
255 Characteristics
94 Theses
5191 Authors

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2021 Year in Review
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Recent Database Additions
Ferroelectricity of HfxZr1-xO2 thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium Hydrogen-plasma-assisted hybrid atomic layer deposition of Ir thin film as novel Cu diffusion barrier Self-limiting diamond growth from alternating CFx and H fluxes Sub-10-nm ferroelectric Gd-doped HfO2 layers

Changsoo Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Changsoo Lee returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1The Effects of UV Exposure on Plasma-Enhanced Atomic Layer Deposition ZnO Thin Film Transistor
2Plasma-Enhanced ALD of TiO2 Thin Films on SUS 304 Stainless Steel for Photocatalytic Application
3GeSbTe deposition for the PRAM application
4Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer
5Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition
6Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition

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