The Effects of UV Exposure on Plasma-Enhanced Atomic Layer Deposition ZnO Thin Film Transistor

Publication Information

Title: The Effects of UV Exposure on Plasma-Enhanced Atomic Layer Deposition ZnO Thin Film Transistor

Type: Journal

Info: Electrochemical and Solid-State Letters, 13 (5) H151-H154 (2010)

Date: 2010-03-04

DOI: http://dx.doi.org/10.1149/1.3322733

Name

Institution

S. J. Lim

Pohang University of Science and Technology (POSTECH)

Yonsei University

Yonsei University

Pohang University of Science and Technology (POSTECH)

Dankook University

Yonsei University

557-20-0

7782-44-7

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

Rudolf AutoEL II

Chemical Binding

XPS, X-ray Photoelectron Spectroscopy

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Resistivity, Sheet Resistance

Hall Measurements

Transfer Curves