Publication Information

Title:
Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition
Type:
Journal
Info:
Journal of Vacuum Science & Technology A 38, 052409 (2020)
Date:
2020-07-21

Author Information

Name Institution
Brian C. WelchUniversity of Colorado, Boulder
Olivia M. McInteeUniversity of Colorado, Boulder
Anand B. OdeUniversity of Colorado, Boulder
Bonnie B. McKenzieSandia National Laboratories
Alan R. GreenbergUniversity of Colorado, Boulder
Victor M. BrightUniversity of Colorado, Boulder
Steven GeorgeUniversity of Colorado, Boulder

Films

Plasma Al2O3


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Air Permeability
Analysis: Custom

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Images
Analysis: Optical Microscopy

Substrates

AAO, Anodic Aluminum Oxide
Silicon

Keywords

Notes

1535