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Plasma-enhanced ALD system for SRF cavity
Type:
Conference Proceedings
Info:
18th International Conference on RF Superconductivity
Date:
2017-07-17
Author Information
| Name | Institution |
|---|---|
| S. Kato | High Energy Accelerator Research Organization (KEK) |
| H. Hayano | High Energy Accelerator Research Organization (KEK) |
Films
Plasma NbN
Film/Plasma Properties
Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Characteristic: Compositional Depth Profiling
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Substrates
| Silicon |
Notes
| 1116 |