Publication Information

Title: Plasma-enhanced ALD system for SRF cavity

Type: Conference Proceedings

Info: 18th International Conference on RF Superconductivity

Date: 2017-07-17

DOI: http://dx.doi.org/10.18429/JACoW-SRF2017-THPB055

Author Information

Name

Institution

High Energy Accelerator Research Organization (KEK)

High Energy Accelerator Research Organization (KEK)

Films

Plasma NbN using Custom ICP

Deposition Temperature = 150C

0-0-0

7664-41-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Morphology, Roughness, Topography

SEM, Scanning Electron Microscopy

Unknown

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

Unknown

Compositional Depth Profiling

XPS, X-ray Photoelectron Spectroscopy

Unknown

Thickness

SEM, Scanning Electron Microscopy

Unknown

Substrates

Silicon

Keywords

Superconductor

Notes

1116



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