The publication database currently has 1559 entries.
Search from:
192 Films Compositions
265 Precursors and Plasma Gases
75 Deposition Hardwares
241 Film and Plasma Characteristics
83 Theses
Use Multifactor Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)
ALD Links
Contact Us
Advertising
Recent Database Additions
Improved dielectric properties of BeO thin films grown by plasma enhanced atomic layer deposition
Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films
Plasma-enhanced atomic layer deposition of hafnium silicate thin films using a single source precursor
Search 1559 plasma ALD publications by:
Search 1559 plasma ALD publications by:
H. Hayano Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by H. Hayano returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Plasma-enhanced ALD system for SRF cavity |
Popular Precursors
Top Authors
| Erwin (W.M.M.) Kessels |
| Hyeongtag Jeon |
| Hyungjun Kim |
| Mauritius C. M. (Richard) van de Sanden |
| Christophe Detavernier |