Nb(N-tBu)(NMeEt)3, TBTMEN, CAS# 864150-47-0

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1EreztechTert-butylimido tris(methylethylamino)niobium

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition
2Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application
3Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
4Plasma-enhanced ALD system for SRF cavity