Nb(N-tBu)(NMeEt)3, TBTMEN, CAS# 0-0-0

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application
2Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
3Plasma-enhanced ALD system for SRF cavity


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