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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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NbN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing NbN films returned 20 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
2Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires
3Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
4Atomic Layer Deposition of Niobium Nitride from Different Precursors
5Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
6Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
7Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
8Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
9Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
10Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
11RF Characterization of Novel Superconducting Materials and Multilayers
12Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
13Tribological properties of thin films made by atomic layer deposition sliding against silicon
14Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
15Performance of Samples with Novel SRF Materials and Growth Techniques
16Plasma-enhanced atomic layer deposition of superconducting niobium nitride
17A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
18Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
19Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application
20Plasma-enhanced ALD system for SRF cavity