NbN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing NbN films returned 17 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application
2Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
3Atomic Layer Deposition of Niobium Nitride from Different Precursors
4Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
5Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
6Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
7Performance of Samples with Novel SRF Materials and Growth Techniques
8Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
9Plasma-enhanced ALD system for SRF cavity
10Plasma-enhanced atomic layer deposition of superconducting niobium nitride
11Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
12Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
13Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
14Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
15Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
16Tribological properties of thin films made by atomic layer deposition sliding against silicon
17Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices