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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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NbN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing NbN films returned 20 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Performance of Samples with Novel SRF Materials and Growth Techniques
2A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
3Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires
4Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
5Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
6Plasma-enhanced ALD system for SRF cavity
7Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
8RF Characterization of Novel Superconducting Materials and Multilayers
9Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application
10Plasma-enhanced atomic layer deposition of superconducting niobium nitride
11Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
12Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
13Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
14Atomic Layer Deposition of Niobium Nitride from Different Precursors
15Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
16Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
17Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
18Tribological properties of thin films made by atomic layer deposition sliding against silicon
19Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
20Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition