NbN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing NbN films returned 14 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application
2Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
3Atomic Layer Deposition of Niobium Nitride from Different Precursors
4Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
5Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
6Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
7Plasma-enhanced ALD system for SRF cavity
8Plasma-enhanced atomic layer deposition of superconducting niobium nitride
9Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
10Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
11Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
12Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
13Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
14Tribological properties of thin films made by atomic layer deposition sliding against silicon