NbN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing NbN films returned 20 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1RF Characterization of Novel Superconducting Materials and Multilayers
2Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
3Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
4Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
5Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
6Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
7Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires
8Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
9Plasma-enhanced ALD system for SRF cavity
10Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
11Performance of Samples with Novel SRF Materials and Growth Techniques
12A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
13Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
14Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application
15Atomic Layer Deposition of Niobium Nitride from Different Precursors
16Tribological properties of thin films made by atomic layer deposition sliding against silicon
17Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
18Plasma-enhanced atomic layer deposition of superconducting niobium nitride
19Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
20Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators