NbN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing NbN films returned 20 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
2Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
3Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
4Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
5Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application
6Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
7Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
8Tribological properties of thin films made by atomic layer deposition sliding against silicon
9Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
10Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
11Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
12Plasma-enhanced ALD system for SRF cavity
13Atomic Layer Deposition of Niobium Nitride from Different Precursors
14Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires
15Plasma-enhanced atomic layer deposition of superconducting niobium nitride
16Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
17RF Characterization of Novel Superconducting Materials and Multilayers
18Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
19Performance of Samples with Novel SRF Materials and Growth Techniques
20Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices