NbN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing NbN films returned 11 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application
2Atomic Layer Deposition of Niobium Nitride from Different Precursors
3Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
4Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
5Plasma-enhanced ALD system for SRF cavity
6Plasma-enhanced atomic layer deposition of superconducting niobium nitride
7Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
8Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
9Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
10Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
11Tribological properties of thin films made by atomic layer deposition sliding against silicon


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