Publication Information

Title:
Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
Type:
Journal
Info:
IEEE Transactions on Applied Superconductivity (Volume: 27, Issue: 4, June 2017)
Date:
2017-01-19

Author Information

Name Institution
M. UkibeNational Institute of Advanced Industrial Science and Technology
G. FujiiNational Institute of Advanced Industrial Science and Technology

Films


Film/Plasma Properties

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Superconductivity
Analysis: -

Substrates

Sapphire

Keywords

Superconductor

Notes

1026