TBTDEN, Tris(diethylamido)(tert-butylimido)niobium, CAS# 210363-27-2

Where to buy

1Strem Chemicals, Inc.🇺🇸(t-Butylimido)tris(diethylamino)niobium(V), min. 98%
2Ereztech🇺🇸Tris(diethylamido) (tert-butylimido) niobium(V)

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 16 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films
2In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications
3Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
4Atomic Layer Deposition of Niobium Nitride from Different Precursors
5Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
6Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
7Performance of Samples with Novel SRF Materials and Growth Techniques
8Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
9Plasma-enhanced atomic layer deposition of superconducting niobium nitride
10Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
11Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
12Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
13Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
14Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
15Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
16Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition