TBTDEN, Tris(diethylamido)(tert-butylimido)niobium, CAS# 210363-27-2

Where to buy

1Strem Chemicals, Inc.🇺🇸(t-Butylimido)tris(diethylamino)niobium(V), min. 98%
2Ereztech🇺🇸Tris(diethylamido) (tert-butylimido) niobium(V)

www.plasma-ald.com does not endorse any chemical suppliers. These links are provided for the benefit of our users. If a link goes bad, let us know.

If you would like your company's precursor products listed, or your existing listing changed or removed, send me an email.

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 16 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Performance of Samples with Novel SRF Materials and Growth Techniques
2Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
3Plasma-enhanced atomic layer deposition of superconducting niobium nitride
4Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
5In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications
6Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
7Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films
8Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
9Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
10Atomic Layer Deposition of Niobium Nitride from Different Precursors
11Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
12Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
13Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
14Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
15Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
16Nanowire single-photon detectors made of atomic layer-deposited niobium nitride