TBTDEN, Tris(diethylamido)(tert-butylimido)niobium, CAS# 210363-27-2

Where to buy

Number	Vendor	Link
1	Strem Chemicals, Inc.	(t-Butylimido)tris(diethylamino)niobium(V), min. 98%
2	Ereztech	Tris(diethylamido)(tert-butylimido)niobium(V) (98%-Nb)

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films
2	Atomic Layer Deposition of Niobium Nitride from Different Precursors
3	Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
4	Plasma-enhanced atomic layer deposition of superconducting niobium nitride
5	Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
6	Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
7	Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
8	Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
9	Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition

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