Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN

Type:
Journal
Info:
Applied Physics Letters 115, 241101 (2019)
Date:
2019-11-26

Author Information

Name Institution
Risheng ChengYale University
Sihao WangYale University
Hong X. TangYale University

Films


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe

Characteristic: Resistivity, Sheet Resistance
Analysis: van der Pauw sheet resistance

Characteristic: Superconductivity
Analysis: -

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Characteristic: Compositional Depth Profiling
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Photoresponse
Analysis: SNSPDs, Superconducting nanowire single-photon detectors

Substrates

Si3N4

Keywords

Notes

1545