Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
Type:
Journal
Info:
Applied Physics Letters 115, 241101 (2019)
Date:
2019-11-26
Author Information
| Name | Institution |
|---|---|
| Risheng Cheng | Yale University |
| Sihao Wang | Yale University |
| Hong X. Tang | Yale University |
Films
Plasma NbN
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Characteristic: Resistivity, Sheet Resistance
Analysis: van der Pauw sheet resistance
Characteristic: Superconductivity
Analysis: -
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Characteristic: Compositional Depth Profiling
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Photoresponse
Analysis: SNSPDs, Superconducting nanowire single-photon detectors
Substrates
| Si3N4 |
Notes
| 1545 |