Publication Information

Title:
Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
Type:
Journal
Info:
Supercond. Sci. Technol. 26 025008, 2013
Date:
2012-11-23

Author Information

Name Institution
Mario ZieglerLeibniz Institute of Photonic Technology
Ludwig FritzschLeibniz Institute of Photonic Technology
Julia DayLeibniz Institute of Photonic Technology
Sven LinzenLeibniz Institute of Photonic Technology
Solveig AndersLeibniz Institute of Photonic Technology
Julia ToussaintLeibniz Institute of Photonic Technology
Hans-Georg MeyerLeibniz Institute of Photonic Technology

Films


Film/Plasma Properties

Characteristic: Critical Temperature
Analysis: Four-point Probe

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe

Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry

Characteristic: Thickness
Analysis: Profilometry

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Substrates

Al2O3

Keywords

Superconductor

Notes

629