Hans-Georg Meyer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hans-Georg Meyer returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma
2Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
3Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
4Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition