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Hans-Georg Meyer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hans-Georg Meyer returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
2Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
3Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma
4Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings