Hans-Georg Meyer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hans-Georg Meyer returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
2Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma
3Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
4Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings