Publication Information

Title: Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings

Type: Journal

Info: Surface & Coatings Technology 221 (2013) 158 - 162

Date: 2013-01-23

DOI: http://dx.doi.org/10.1016/j.surfcoat.2013.01.044

Author Information

Name

Institution

Leibniz Institute of Photonic Technology

Leibniz Institute of Photonic Technology

Leibniz Institute of Photonic Technology

Leibniz Institute of Photonic Technology

Leibniz Institute of Photonic Technology

Leibniz Institute of Photonic Technology

Films

Deposition Temperature = 120C

75-24-1

7782-44-7

Deposition Temperature = 120C

15112-89-7

7782-44-7

Deposition Temperature = 120C

546-68-9

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Transmittance

Optical Transmission

Custom

Reflectivity

Optical Reflectivity

Custom

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Unknown

Substrates

Silicon

Borofloat 33 Glass

Keywords

Notes

Anodic bonding worked for substrates coated with Al2O3 and SiO2 but not TiO2.

574



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