Publication Information

Title:
Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
Type:
Journal
Info:
Surface & Coatings Technology 221 (2013) 158 - 162
Date:
2013-01-23

Author Information

Name Institution
S. WoetzelLeibniz Institute of Photonic Technology
Florian TalkenbergLeibniz Institute of Photonic Technology
T. ScholtesLeibniz Institute of Photonic Technology
R. IJsselsteijnLeibniz Institute of Photonic Technology
V. SchultzeLeibniz Institute of Photonic Technology
Hans-Georg MeyerLeibniz Institute of Photonic Technology

Films

Plasma Al2O3


Plasma SiO2


Plasma TiO2


Film/Plasma Properties

Characteristic: Transmittance
Analysis: Optical Transmission

Characteristic: Reflectivity
Analysis: Optical Reflectivity

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Substrates

Silicon
Borofloat 33 Glass

Keywords

Notes

Anodic bonding worked for substrates coated with Al2O3 and SiO2 but not TiO2.
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