Mario Ziegler Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mario Ziegler returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma
2	Background-Free Bottom-Up Plasmonic Arrays with Increased Sensitivity, Specificity and Shelf Life for SERS Detection Schemes
3	Electrically Excited Plasmonic Nanoruler for Biomolecule Detection
4	Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
5	Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
6	Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition

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