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The publication database currently has 1567 entries.

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265 Precursors and Plasma Gases

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In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films Influence of oxygen source on the ferroelectric properties of ALD grown Hf_1-xZr_xO₂ films

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195 Films Compositions

265 Precursors and Plasma Gases

76 Deposition Hardwares

242 Film and Plasma Characteristics

Mario Ziegler Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mario Ziegler returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	3D structure evolution using metastable atomic layer deposition based on planar silver templates
2	Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H₂/N₂ plasma
3	Background-Free Bottom-Up Plasmonic Arrays with Increased Sensitivity, Specificity and Shelf Life for SERS Detection Schemes
4	Electrically Excited Plasmonic Nanoruler for Biomolecule Detection
5	Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
6	Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
7	Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition