Your search for plasma enhanced atomic layer deposition publications authored by Mario Ziegler returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma|
|2||Background-Free Bottom-Up Plasmonic Arrays with Increased Sensitivity, Specificity and Shelf Life for SERS Detection Schemes|
|3||Electrically Excited Plasmonic Nanoruler for Biomolecule Detection|
|4||Nanowire single-photon detectors made of atomic layer-deposited niobium nitride|
|5||Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition|
|6||Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition|
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