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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Mario Ziegler Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mario Ziegler returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
13D structure evolution using metastable atomic layer deposition based on planar silver templates
2Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
3Electrically Excited Plasmonic Nanoruler for Biomolecule Detection
4Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
5Background-Free Bottom-Up Plasmonic Arrays with Increased Sensitivity, Specificity and Shelf Life for SERS Detection Schemes
6Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
7Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma
8Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition