Mario Ziegler Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mario Ziegler returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
2Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma
3Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
4Electrically Excited Plasmonic Nanoruler for Biomolecule Detection
53D structure evolution using metastable atomic layer deposition based on planar silver templates
6Background-Free Bottom-Up Plasmonic Arrays with Increased Sensitivity, Specificity and Shelf Life for SERS Detection Schemes
7Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
8Nanowire single-photon detectors made of atomic layer-deposited niobium nitride