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3D structure evolution using metastable atomic layer deposition based on planar silver templates
Type:
Journal
Info:
Applied Surface Science 514 (2020) 145770
Date:
2020-02-13
Author Information
| Name | Institution |
|---|---|
| Mario Ziegler | Leibniz Institute of Photonic Technology |
| Sophie Thamm | Leibniz Institute of Photonic Technology |
| H. Lisa K.S. Stolle | Leibniz Institute for Solid State and Materials Research |
| Jan Dellith | Leibniz Institute for Solid State and Materials Research |
| Uwe Hübner | Leibniz Institute for Solid State and Materials Research |
| Dong Wang | Ilmenau University of Technology |
| Peter Schaaf | Ilmenau University of Technology |
Films
Film/Plasma Properties
Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Thickness
Analysis: Profilometry
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Substrates
| Ag |
Notes
| 1524 |