Publication Information

Title:
3D structure evolution using metastable atomic layer deposition based on planar silver templates
Type:
Journal
Info:
Applied Surface Science 514 (2020) 145770
Date:
2020-02-13

Author Information

Name Institution
Mario ZieglerLeibniz Institute of Photonic Technology
Sophie ThammLeibniz Institute of Photonic Technology
H. Lisa K.S. StolleLeibniz Institute for Solid State and Materials Research
Jan DellithLeibniz Institute for Solid State and Materials Research
Uwe HübnerLeibniz Institute for Solid State and Materials Research
Dong WangIlmenau University of Technology
Peter SchaafIlmenau University of Technology

Films

Plasma SiO2


Film/Plasma Properties

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Thickness
Analysis: Profilometry

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Substrates

Ag

Keywords

Notes

1524