Inductively coupled plasma sources from Plasma ALD, LLC.


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Peter Schaaf Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Peter Schaaf returned 2 record(s).

NumberTitle
13D structure evolution using metastable atomic layer deposition based on planar silver templates
2Tuning the nanoscale morphology and optical properties of porous gold nanoparticles by surface passivation and annealing