Jan Dellith Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Jan Dellith returned 2 record(s).
| Number | Title |
|---|---|
| 1 | 3D structure evolution using metastable atomic layer deposition based on planar silver templates |
| 2 | Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma |