Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
Type:
Journal
Info:
Superconductor Science and Technology, Volume 30, Number 3
Date:
2019-09-27
Author Information
Name | Institution |
---|---|
Emanuel Knehr | Leibniz Institute of Photonic Technology |
Artem Kuzmin | Karlsruhe Institute of Technology (KIT) |
Denis Y Vodolazov | Russian Academy of Sciences |
Mario Ziegler | Leibniz Institute of Photonic Technology |
Steffen Doerner | Karlsruhe Institute of Technology (KIT) |
Konstantin Il'in | Karlsruhe Institute of Technology (KIT) |
Michael Siegel | Karlsruhe Institute of Technology (KIT) |
Ronny Stolz | Leibniz Institute of Photonic Technology |
Heidemarie Schmidt | Leibniz Institute of Photonic Technology |
Films
Plasma NbN
Film/Plasma Properties
Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Characteristic: Critical Temperature
Analysis: -
Characteristic: Superconductivity
Analysis: -
Substrates
Sapphire |
Notes
1374 |