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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
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Solveig Anders Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Solveig Anders returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
2Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma