Solveig Anders Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Solveig Anders returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma|
|2||Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition|