Sven Linzen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sven Linzen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
2Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition