A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
Type:
Journal
Info:
Technical Physics, 2021, Vol. 66, No. 4, pp. 655-660.
Date:
2020-11-06
Author Information
| Name | Institution |
|---|---|
| Max V. Shibalov | Russian Academy of Sciences |
| N. V. Porokhov | Russian Academy of Sciences |
| A. M. Mumlyakov | Russian Academy of Sciences |
| I. V. Trofimov | Russian Academy of Sciences |
| G. D. Dyud’bin | Russian Academy of Sciences |
| E. R. Timofeeva | Russian Academy of Sciences |
| A. M. Tagachenkov | Russian Academy of Sciences |
| Y. V. Anufriev | Russian Academy of Sciences |
| E. V. Zenova | Russian Academy of Sciences |
| Michael A. Tarkhov | Russian Academy of Sciences |
Films
Plasma NbN
Film/Plasma Properties
Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Critical Temperature
Analysis: -
Characteristic: Critical Current Density
Analysis: -
Substrates
| SiO2 |
Notes
| 1678 |