N. V. Porokhov Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by N. V. Porokhov returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate|
|2||A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition|