A. M. Tagachenkov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by A. M. Tagachenkov returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Dielectric properties investigation of a compound based on atomic layer deposited multi-layer structure
2Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate