E. R. Timofeeva Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by E. R. Timofeeva returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate