Publication Information

Title:
Plasma Processing for Crystallization and Densification of Atomic Layer Deposition BaTiO3 Thin Films
Type:
Journal
Info:
ACS Appl. Mater. Interfaces, 2014, 6 (13), pp 10656-10660
Date:
2014-06-19

Author Information

Name Institution
Jihwan AnStanford University

Films


Plasma Al2O3


Film/Plasma Properties

Substrates

Keywords

Notes

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