BaTiO3 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing BaTiO3 films returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1High Energy Density Capacitor By Plasma-Treated ALD BaTiO3 Thin Films
2Plasma Processing for Crystallization and Densification of Atomic Layer Deposition BaTiO3 Thin Films
3Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
4Plasma-enhanced atomic layer deposition of BaTiO3
5Thermal conductivity of ultrathin BaTiO3 films grown by plasma-assisted atomic layer deposition