
Thermal conductivity of ultrathin BaTiO3 films grown by plasma-assisted atomic layer deposition
Type:
Journal
Info:
Scripta Materialia, Volume 154, Pages 225-229
Date:
2018-05-29
Author Information
Name | Institution |
---|---|
Jungwan Cho | Kyung Hee University |
Joonsuk Park | Stanford University |
Fritz B. Prinz | Stanford University |
Jihwan An | Stanford University |
Films
Plasma BaTiO3
Film/Plasma Properties
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: TEM, Transmission Electron Microscope
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Characteristic: Morphology, Roughness, Topography
Analysis: XRR, X-Ray Reflectivity
Characteristic: Thermal Conductivity
Analysis: TDTR, Time-Domain ThermoReflectance
Substrates
Silicon |
Notes
1539 |