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Thermal conductivity of ultrathin BaTiO3 films grown by plasma-assisted atomic layer deposition
Type:
Journal
Info:
Scripta Materialia, Volume 154, Pages 225-229
Date:
2018-05-29
Author Information
| Name | Institution |
|---|---|
| Jungwan Cho | Kyung Hee University |
| Joonsuk Park | Stanford University |
| Fritz B. Prinz | Stanford University |
| Jihwan An | Stanford University |
Films
Plasma BaTiO3
Film/Plasma Properties
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: TEM, Transmission Electron Microscope
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Characteristic: Morphology, Roughness, Topography
Analysis: XRR, X-Ray Reflectivity
Characteristic: Thermal Conductivity
Analysis: TDTR, Time-Domain ThermoReflectance
Substrates
| Silicon |
Notes
| 1539 |