Fritz B. Prinz Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Fritz B. Prinz returned 13 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Approaching the limits of dielectric breakdown for SiO2 films deposited by plasma-enhanced atomic layer deposition
2Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
3Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
4Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
5Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
6High Energy Density Capacitor By Plasma-Treated ALD BaTiO3 Thin Films
7Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
8Plasma-enhanced atomic layer deposition of BaTiO3
9Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
10Plasma-enhanced atomic layer deposition of superconducting niobium nitride
11Plasma-enhanced atomic layer deposition of tungsten nitride
12Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
13Thermal conductivity of ultrathin BaTiO3 films grown by plasma-assisted atomic layer deposition