Fritz B. Prinz Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Fritz B. Prinz returned 12 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Approaching the limits of dielectric breakdown for SiO2 films deposited by plasma-enhanced atomic layer deposition
2	Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
3	Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
4	Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
5	Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
6	High Energy Density Capacitor By Plasma-Treated ALD BaTiO3 Thin Films
7	Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
8	Plasma-enhanced atomic layer deposition of BaTiO3
9	Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
10	Plasma-enhanced atomic layer deposition of superconducting niobium nitride
11	Plasma-enhanced atomic layer deposition of tungsten nitride
12	Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition

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