2022 Year in Review

February 2023 Stats


The publication database currently has 1673 entries.
204 Films
279 Precursors
78 Dep Hardware Sets
253 Characteristics
91 Theses
5136 Authors

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2021 Year in Review
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Recent Database Additions
Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution Hierarchical Atomic Layer Deposited V2O5 on 3D Printed Nanocarbon Electrodes for High-Performance Aqueous Zinc-Ion Batteries Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes

Jihwan An Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jihwan An returned 11 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-enhanced atomic layer deposition of BaTiO3
2Atomic layer deposition of ultrathin blocking layer for low-temperature solid oxide fuel cell on nanoporous substrate
3Plasma Processing for Crystallization and Densification of Atomic Layer Deposition BaTiO3 Thin Films
4Optimization of Y2O3 dopant concentration of yttria stabilized zirconia thin film electrolyte prepared by plasma enhanced atomic layer deposition for high performance thin film solid oxide fuel cells
5Properties of nanostructured undoped ZrO2 thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells
6Effect of anode morphology on the performance of thin film solid oxide fuel cell with PEALD YSZ electrolyte
7Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
8Surface engineering of nanoporous substrate for solid oxide fuel cells with atomic layer-deposited electrolyte
9Thermal conductivity of ultrathin BaTiO3 films grown by plasma-assisted atomic layer deposition
10PEALD YSZ-based bilayer electrolyte for thin film-solid oxide fuel cells
11High Energy Density Capacitor By Plasma-Treated ALD BaTiO3 Thin Films

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