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The publication database currently has 1538 entries.
Search from:
189 Films Compositions
401 Precursors and Plasma Gases
75 Deposition Hardwares
239 Film and Plasma Characteristics
82 Theses

Use Multifactor Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)


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Recent Database Additions
Ultrahigh purity conditions for nitride growth with low oxygen content by plasma-enhanced atomic layer deposition α-Ga2O3 grown by low temperature atomic layer deposition on sapphire Remote plasma atomic layer deposition of silicon nitride with bis(dimethylaminomethyl-silyl)trimethylsilyl amine and N2 plasma for gate spacer
Search 1538 plasma ALD publications by:
189 Films Compositions
401 Precursors and Plasma Gases
75 Deposition Hardwares
239 Film and Plasma Characteristics

Jihwan An Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jihwan An returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of ultrathin blocking layer for low-temperature solid oxide fuel cell on nanoporous substrate
2Effect of anode morphology on the performance of thin film solid oxide fuel cell with PEALD YSZ electrolyte
3High Energy Density Capacitor By Plasma-Treated ALD BaTiO3 Thin Films
4PEALD YSZ-based bilayer electrolyte for thin film-solid oxide fuel cells
5Plasma Processing for Crystallization and Densification of Atomic Layer Deposition BaTiO3 Thin Films
6Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
7Plasma-enhanced atomic layer deposition of BaTiO3
8Properties of nanostructured undoped ZrO2 thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells
9Surface engineering of nanoporous substrate for solid oxide fuel cells with atomic layer-deposited electrolyte

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