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Publication Information

Title: Properties of nanostructured undoped ZrO2 thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells

Type: Journal

Info: Journal of Vacuum Science & Technology A 34, 01A151 (2016)

Date: 2015-12-07

DOI: http://dx.doi.org/10.1116/1.4938105

Author Information

Name

Institution

Seoul National University

Seoul National University

Seoul National University

Seoul National University

Hanyang University

Hanyang University

Seoul National University of Science and Technology

Hanyang University

Seoul National University

Films

Deposition Temperature Range = 100-250C

19756-04-8

7782-44-7

Thermal ZrO2 using Atomic Premium CN1

Deposition Temperature Range = 100-250C

19756-04-8

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Thermo VG-Scientific theta probe

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

PANalytical Xpert PRO MRD X-ray Diffractometer

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Park Systems, XE-150

Images

SEM, Scanning Electron Microscopy

FEI Quanta 3D FEG

Substrates

AAO, Anodic Aluminum Oxide

Silicon

Keywords

SOFC, Solid Oxide Fuel Cell

Notes

447



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