Young-Beom Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Young-Beom Kim returned 2 record(s).

Number	Title
1	PEALD YSZ-based bilayer electrolyte for thin film-solid oxide fuel cells
2	Properties of nanostructured undoped ZrO2 thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells