Inductively coupled plasma sources from Plasma ALD, LLC.


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Bongjun Koo Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Bongjun Koo returned 1 record(s).

NumberTitle
1Properties of nanostructured undoped ZrO2 thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells