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Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors
Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
Hierarchical Atomic Layer Deposited V2O5 on 3D Printed Nanocarbon Electrodes for High-Performance Aqueous Zinc-Ion Batteries
Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes
Atomic layer deposition of ultrathin blocking layer for low-temperature solid oxide fuel cell on nanoporous substrate
Type:
Journal
Info:
Journal of Vacuum Science & Technology A 33, 01A145 (2015)
Date:
2014-12-03
Author Information
| Name | Institution |
|---|---|
| Wonjong Yu | Seoul National University |
| Sanghoon Ji | Seoul National University |
| Gu Young Cho | Seoul National University |
| Seungtak Noh | Seoul National University |
| Waqas Hassan Tanveer | Seoul National University |
| Jihwan An | Seoul National University of Science and Technology |
| Suk Won Cha | Seoul National University |
Films
Plasma YSZ
Film/Plasma Properties
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Microstructure
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Electrochemical Performance
Analysis: Custom
Substrates
| YSZ |
Keywords
| Fuel Cell |
Notes
| 621 |