Search 1528 plasma ALD publications by:
Search 1528 plasma ALD publications by:
Publication Information
Title:
Atomic layer deposition of ultrathin blocking layer for low-temperature solid oxide fuel cell on nanoporous substrate
Type:
Journal
Info:
Journal of Vacuum Science & Technology A 33, 01A145 (2015)
Date:
2014-12-03
Author Information
Name | Institution |
---|---|
Wonjong Yu | Seoul National University |
Sanghoon Ji | Seoul National University |
Gu Young Cho | Seoul National University |
Seungtak Noh | Seoul National University |
Waqas Hassan Tanveer | Seoul National University |
Jihwan An | Seoul National University of Science and Technology |
Suk Won Cha | Seoul National University |
Films
Plasma YSZ
Film/Plasma Properties
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Microstructure
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Electrochemical Performance
Analysis: Custom
Substrates
YSZ |
Keywords
Fuel Cell |
Notes
621 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |