Atomic Premium CN1 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Atomic Premium CN1 hardware returned 15 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
146-2: Multi-Level-Pressure Touch Sensors with P(VDF-TrFE) Deposited on Metal Oxide Thin Film Transistor
2Atomic layer deposition of ultrathin blocking layer for low-temperature solid oxide fuel cell on nanoporous substrate
3Effect of anode morphology on the performance of thin film solid oxide fuel cell with PEALD YSZ electrolyte
4Effect of NH3 plasma passivation on the electrical characteristics of a nanolaminated ALD HfAlO on InGaAs MOS capacitor
5Effects of carbon contaminations on Y2O3-stabilized ZrO2 thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells
6Growth characteristics and properties of Ga-doped ZnO (GZO) thin films grown by thermal and plasma-enhanced atomic layer deposition
7In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
8In situ dry cleaning of Si wafer using OF2/NH3 remote plasma with low global warming potential
9Large-scale synthesis of uniform hexagonal boron nitride films by plasma-enhanced atomic layer deposition
10Plasma-Enhanced Atomic Layer Deposition of Nanoscale Yttria-Stabilized Zirconia Electrolyte for Solid Oxide Fuel Cells with Porous Substrate
11Plasma-enhanced atomic layer deposition of nickel thin film using bis(1,4-diisopropyl-1,4-diazabutadiene)nickel
12Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor
13Properties of nanostructured undoped ZrO2 thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells
14Study of Y2O3 Thin Film Prepared by Plasma Enhanced Atomic Layer Deposition
15Surface engineering of nanoporous substrate for solid oxide fuel cells with atomic layer-deposited electrolyte