CN1 Atomic Premium Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using CN1 Atomic Premium hardware returned 17 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor
2In situ dry cleaning of Si wafer using OF2/NH3 remote plasma with low global warming potential
3Crystalline AlN Interfacial Layer on GaN Using Plasma-Enhanced Atomic Layer Deposition
4Optimization of Y2O3 dopant concentration of yttria stabilized zirconia thin film electrolyte prepared by plasma enhanced atomic layer deposition for high performance thin film solid oxide fuel cells
5Effect of NH3 plasma passivation on the electrical characteristics of a nanolaminated ALD HfAlO on InGaAs MOS capacitor
6Study of Y2O3 Thin Film Prepared by Plasma Enhanced Atomic Layer Deposition
7Plasma-Enhanced Atomic Layer Deposition of Nanoscale Yttria-Stabilized Zirconia Electrolyte for Solid Oxide Fuel Cells with Porous Substrate
8Surface engineering of nanoporous substrate for solid oxide fuel cells with atomic layer-deposited electrolyte
9Plasma-enhanced atomic layer deposition of nickel thin film using bis(1,4-diisopropyl-1,4-diazabutadiene)nickel
10Effect of anode morphology on the performance of thin film solid oxide fuel cell with PEALD YSZ electrolyte
11Large-scale synthesis of uniform hexagonal boron nitride films by plasma-enhanced atomic layer deposition
1246-2: Multi-Level-Pressure Touch Sensors with P(VDF-TrFE) Deposited on Metal Oxide Thin Film Transistor
13Growth characteristics and properties of Ga-doped ZnO (GZO) thin films grown by thermal and plasma-enhanced atomic layer deposition
14In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
15Properties of nanostructured undoped ZrO2 thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells
16Effects of carbon contaminations on Y2O3-stabilized ZrO2 thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells
17Atomic layer deposition of ultrathin blocking layer for low-temperature solid oxide fuel cell on nanoporous substrate