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Publication Information

Title: Growth characteristics and properties of Ga-doped ZnO (GZO) thin films grown by thermal and plasma-enhanced atomic layer deposition

Type: Journal

Info: Applied Surface Science 295 (2014) 260 - 265

Date: 2014-01-06

DOI: http://dx.doi.org/10.1016/j.apsusc.2014.01.027

Author Information

Name

Institution

Yonsei University

Yonsei University

Yonsei University

Yonsei University

Films

Deposition Temperature Range N/A

Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

PEALD Film Development

Plasma vs Thermal Comparison

Notes

452


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