Publication Information

Title:
Growth characteristics and properties of Ga-doped ZnO (GZO) thin films grown by thermal and plasma-enhanced atomic layer deposition
Type:
Journal
Info:
Applied Surface Science 295 (2014) 260 - 265
Date:
2014-01-06

Author Information

Name Institution
Taewook NamYonsei University
Chang Wan LeeYonsei University
Hyun Jae KimYonsei University
Hyungjun KimYonsei University

Films

Thermal Ga:ZnO

Hardware used: Atomic Premium CN1


Plasma Ga:ZnO

Hardware used: Atomic Premium CN1


Film/Plasma Properties

Substrates

Keywords

PEALD Film Development
Plasma vs Thermal Comparison

Notes

452