Growth characteristics and properties of Ga-doped ZnO (GZO) thin films grown by thermal and plasma-enhanced atomic layer deposition

Publication Information

Title: Growth characteristics and properties of Ga-doped ZnO (GZO) thin films grown by thermal and plasma-enhanced atomic layer deposition

Type: Journal

Info: Applied Surface Science 295 (2014) 260 - 265

Date: 2014-01-06

DOI: http://dx.doi.org/10.1016/j.apsusc.2014.01.027

Name

Institution

Taewook Nam

Yonsei University

Yonsei University

Yonsei University

Yonsei University

Characteristic

Analysis

Diagnostic

PEALD Film Development

Plasma vs Thermal Comparison

452